Micromachined Thermal Effect Array by Joule Heating for Bio Applications

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概要

• 論文の詳細を見る

• We have developed a micro local heating device for bio applications using micro-electro-mechanical systems (MEMS) technology. The device has a two-dimensional microdish array, which contains a series of diodes. The microdish array is fabricated by means of a combination of complementary metal–oxide–semiconductor (CMOS) technology and MEMS post-processing. The microdish array has a miniature cavity for thermal separation from substrate. These microdish arrays can be generated by a large forward current based on Joule heating. In this paper, we describe the direct heating of the whole microdish array and just an arbitrary portion of the microdish consisting of the device by Joule heating. In the localized selective heating, the highest temperature, 62.6 °C, from all the dishes was confirmed. More than twice the heat effect was achieved in heating an arbitrary portion compared with heating the whole microdish.

• 2008-01-25

著者

• Funaki Hideyuki

  Corporate Research & Development Center Toshiba Corporation

• Itaya Kazuhiko

  Corporate Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan

• Suzuki Kazuhiro

  Corporate Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan

• Naruse Yujiro

  Corporate Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan

• Honda Hiroto

  Corporate Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan

• Uchikoga Shuichi

  Corporate Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan

• Naruse Yujiro

  Corporate Research & Development Center, Toshiba Corporation, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan

• Suzuki Kazuhiro

  Corporate Research & Development Center, Toshiba Corporation, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan

• Funaki Hideyuki

  Corporate Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan

関連論文

• Micromachined Thermal Effect Array by Joule Heating for Bio Applications
• Mechanical Vibration Model for Proteins and Nanoparticles Coupling with the Cell Membrane and its Application to Cell Treatment
• Theoretical Concept of Physical Antibiotics Using Nanoparticles

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