Orientation and Magnetic Properties of the Thick Multilayered [NdFeBx/Tby]n Films

概要

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Multilayered [NdFeBx/Tby]n films were prepared by a three-demensional sputtering system. From the thickness of NdFeB layer dependence on the orientation and magnetic properties of multilayered [NdFeB ($x$ μm)/Tb (50 nm)]n films with 7.2 μm as a total thickness of NdFeB layers, it was found that the orientation of NdFeB grains was maintained. However, the coercivity was enhanced with decreasing the thickness of each NdFeB thin layer. The $(\mathrm{BH})_{\text{max}}$ value of 240 kJ/m3 was obtained on the layered [NdFeB (1.2 μm)/Tb (50 nm)]6 film as an optimal value. For the multilayered [NdFeB (1.2 μm)/Tb (50 nm)]n films with various multiple layer sets ($n$), the coercivity value increased with the film thickness without any deterioration of the $c$-axis texture and consequently, multilayered NdFeB/Tb film magnets with total thickness values around 70 μm showed the superior magnetic properties ($H_{\text{cj}}\approx 1360$ kA/m, $I_{\text{r}}\approx 1.05$ T, and $(\mathrm{BH})_{\text{max}}\approx 202$ kJ/m3).
2007-07-15