Assignment of Axial Wavenumber in a Plasma Absorption Probe

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概要

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• A plasma absorption probe (PAP) developed in previous studies is a novel plasma diagnosis, which is adopted even in a reactive gas. In the previous studies, higher series of measured absorptions were attributed to the higher-order azimuthal modes of plasma surface waves, showing a poor agreement with the theoretical prediction. In this theoretical note, the data from the previous studies are processed by considering that the absorptions are caused by the higher-order axial modes of plasma surface waves. The treated data show a good agreement with the theory within the accuracy of measurement.

• 2007-10-15

著者

• Ramaswamy Kartik

  Applied Materials Inc., 3050 Bowers Ave., MS. 81517, Santa Clara, CA 95054, U.S.A.

• Kobayashi Satoru

  Applied Materials Inc., 3050 Bowers Ave., MS. 81517, Santa Clara, CA 95054, U.S.A.

関連論文

• Assignment of Axial Wavenumber in a Plasma Absorption Probe

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