Blue Diode Laser Absorption Spectroscopy of Pulsed Magnetron Discharge
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概要
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Laser absorption spectroscopy of aluminium atoms in pulsed magnetron discharge with pure argon, argon/oxygen, and argon/methane gas mixtures is reported. Time-averaged densities and temperatures of sputtered aluminium atoms were extracted from the absorption signal. The measured Al density depended almost linearly on the pulse current and showed a small dependence on pressure. Al atom temperature increased with discharge current and vice versa with pressure. A drastic decrease of the Al atom density was observed in the Ar/O2 mixture. The Al density dropped to a value close to zero once a critical oxygen gas flow rate was reached. This critical oxygen gas flow was significantly higher in pulsed mode than in DC mode.
- 2006-10-30
著者
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Jastrabik Lubomir
Institute Of Physics Academy Of Sciences Of The Czech Republic
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Olejnicek Jiri
Institute Of Physics Academy Of Sciences Of The Czech Republic
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Hubicka Zdenek
Institute Of Physics Academy Of Sciences Of The Czech Republic
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Do Hoang
Institute of Physics, Ernst-Moritz-Arndt-University Greifswald, Domstraße 10a, 17489 Greifswald, Germany
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Hippler Rainer
Institute of Physics, Ernst-Moritz-Arndt-University Greifswald, Domstraße 10a, 17489 Greifswald, Germany
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Olejnicek Jiri
Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 18221 Prague, Czech Republic
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Hubicka Zdenek
Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 18221 Prague, Czech Republic
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Jastrabik Lubomir
Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 18221 Prague, Czech Republic
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