Planar Plasma of 30 cm Diameter Maintained by Hybrid Surface Microwave through Annular Slot Antenna
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概要
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Planar plasma of 30 cm diameter excited by microwave with an annular slot antenna is described. The annular slot antenna consists of two layers of dielectric plates with a filling of an aluminum foil. Its structure resembles a sandwich but the diameter of the aluminum foil is slightly less than that of a plate so as to form an annular slot at the margin of plates. The experimental results showed that the uniformity of plasma density in the radial direction has been improved. No plasma density jump was found when Ar gas pressure increased from 20 to 100 Pa or microwave power increased from 200 to 800 W. The working mechanism of the antenna used in our experiment has been analyzed with the experimental results.
- 2006-10-30
著者
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Wang Fei
Institute Nuclear Energy Technology Tsinghua University
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Liang Bo
Institute Of Modern Physics Fudan University
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Xu Xu
Institute Of Modern Physics Fudan University
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Liang Rongqing
Institute Of Modern Physics Fudan University
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Ou Qiongrong
Institute Of Plasma Physics Chinese Academy Of Sciences
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Ou Qiongrong
Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China
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Liang Bo
Institute of Modern Physics, Fudan University, Shanghai 200433, China
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