Nanoimprinted Focusing Grating Coupler for an Ultra Slim Optical Pickup Head

概要

論文の詳細を見る
Nanoimprinted focusing grating couplers (FGCs) for ultra slim optical pickup head application have been investigated. Inorganic electron beam resist hydrogen silsesquinoxane (HSQ) was used as a master for FGC replication, and polymethylmethacrylate (PMMA) as a transparent stamper for ultra violet (UV) exposure embossing. UV embossing was employed to replicate the fine featured grating patterns in FGC. The focused spot size measured from the replicated coupler showed almost the same quality as theoretically predicted one.
2005-05-15