Fabrication of Roughness-Improved Polymer Waveguides by UV Imprinting Technique

概要

論文の詳細を見る
Increased losses for the telecommunication wavelengths of 1.3 and 1.5 μm and detrimental residual slab waveguide generation make the thermoplastic polymer-based waveguide devices unsuitable for manufacturing optical modules. To overcome this, nearly zero slab polymer waveguides was fabricated in a thermosetting polymer using a UV imprinting technique. Through the sacrificial oxide removal of the silicon mold, the sidewall roughness of the imprinted convex waveguide decreased; consequently, propagation loss can decrease to a level as small as the material loss.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
2005-05-15