Fabrication of Half-Wave Plates with Subwavelength Structures

概要

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Various optical elements with subwavelength structures are currently being developed. Because phase plates require a deep grating structure in which the line width is narrow and the aspect ratio is high, it has been difficult to develop half-wave plates. We have designed and developed $\lambda/2$ plates, and evaluated their optical characteristics. The fabricated phase plates have subwavelength gratings the depth of which is 1170 nm with a period of 260 nm. The phase plates achieved a phase retardation of 180 deg. at a wavelength of approximately 850 nm, and 90 deg. at the optical communication wavelength of approximately 1550 nm. The transmittance was approximately 70% around 850 nm and approximately 80% around 1550 nm.
2004-08-15