Fabrication of Multimode Polymeric Waveguides by Hot Embossing Lithography

概要

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The fabrication of polymeric waveguides and the loss of waveguides were investigated for optical interconnection. Multimode polymeric waveguides were fabricated by hot embossing process. The replication of waveguide channels with hot embossing technology is of interest for single step processes that have to deliver a surface roughness far below the wavelength. Resulting waveguides exhibited a smooth surface profile and the square cross section of the core. The average propagation loss of these waveguides was approximately 0.2 dB/cm at 850 nm wavelength.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
2004-06-15