Improving Spin-Coating Process Using Altered Cover Design

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概要

• 論文の詳細を見る

• A novel work chamber cover design for a spin coater that can reduce the effect of airflow on spin coating is presented. The experimental results reveal that superior uniformity and film area can be obtained by utilizing the modified design instead of the conventional design.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 2004-12-15

著者

• Cheng Chao-min

  Department Of Mechanical Engineering National Yunlin University Of Science And Technology

• Chen Ren-Haw

  Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan

• Cheng Chao-Min

  Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan

関連論文

• Design of a Non-Overshooting PID Controller with an Integral Sliding Perturbation Observer for Motor Positioning Systems
• Improving Spin-Coating Process Using Altered Cover Design

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