Laser-Ablation-Induced Concentric Ring Structures

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概要

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• Formation of concentric ring structures on substrate surface by 3rd harmonic Nd:YAG laser ablation is investigated. Experiments show that most of the laser energy on the substrate surface is distributed at the center and the outmost ring. Optical microscope and scanning electron microscope (SEM) observations reveal that concentric ring structures are only formed on the substrate surface at the positions between the focus plane and the lens. Both the outmost ring diameter and the ring number increase with the defocus distance, however, they are not dependent on laser fluence. This phenomenon could be attributed to the lens pupil truncation and its aberration. Laser energy concentrated at the outmost ring can be used to punch via microholes with the diameter determined by the defocus distance. This technique provides a high-speed, high-efficiency manufacturing method for via microhole array fabrication with low-energy laser ablation.

• 2003-08-15

著者

• Chong Tow-chong

  Data Storage Institute

• LAN Bin

  Data Storage Institute

• HONG Ming-Hui

  Data Storage Institute

• YE Kai-Dong

  Data Storage Institute

• WANG Zeng-Bo

  Electrical and Computer Engineering Department, National University of Singapore

• Chen Guo-xin

  Electrical And Computer Engineering Department National University Of Singapore

• Chen Shi-xin

  Electrical And Computer Engineering Department National University Of Singapore

• Wang Zeng-Bo

  Electrical and Computer Engineering Department, National University of Singapore, 10 Kent Ridge Crescent, 119260, Singapore

• Chen Guo-Xin

  Electrical and Computer Engineering Department, National University of Singapore, 10 Kent Ridge Crescent, 119260, Singapore

• Lan Bin

  Data Storage Institute, DSI Building, 5 Engineering Drive 1, (off Kent Ridge Crescent, NUS), 117608, Singapore

• Chen Shi-Xin

  Electrical and Computer Engineering Department, National University of Singapore, 10 Kent Ridge Crescent, 119260, Singapore

関連論文

• Magneto-Optical Properties of Bi-Substituted Rare-Earth Iron Garnets in 1.55-μm-Wavelength Band
• Laser Precision Engineering of Glass Substrates
• Laser-Ablation-Induced Concentric Ring Structures
• Thermally Induced Stability Issues of Head-Disk Interface in Heat-Assisted Magnetic Recording Systems
• Numerical Simulation of Thermal Effects of Read Current on Magnetoresistive Signal
• Numerical Simulation of Thermal Effects of Read Current on Magnetoresistive Signal
• Laser-Ablation-Induced Concentric Ring Structures
• Thermally Induced Stability Issues of Head-Disk Interface in Heat-Assisted Magnetic Recording Systems
• Magneto-Optical Properties of Bi-Substituted Rare-Earth Iron Garnets in 1.55-μm-Wavelength Band
• Second-Harmonic Generation of Ferroelectric Potassium Lithium Niobate Crystals
• Thermal Study of Nanometer-Spaced Head-Disk Systems
• Laser Precision Engineering of Glass Substrates
• CO2-Laser-Induced Regular Periodic Structures on Glass Substrates

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