Temperature Stability of Surface Acoustic Wave Resonators on In-Plane Rotated 33° Y-Cut Quartz

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概要

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• ST-cut quartz has been widely used in surface acoustic wave (SAW) devices due to its good temperature stability. However, ST-cut SAW devices are still not as temperature stable as AT-cut quartz. Hence new SAW resonators with better temperature stability are needed. We present surface acoustic wave resonators on the in-plane rotated 33° Y-cut quartz with improved temperature stability. We calculated the frequency temperature characteristics of Rayleigh waves using the finite element method under the condition of Euler angle (0, 123, 39-44). The second-order temperature coefficients of less than $-1.5\times 10^{-8}$/°C2 were achieved by calculations and experiments. Compared with the second-order temperature coefficients of ST-cut quartz ($-3.4\times 10^{-8}$/°C2), these values are more than 50% smaller. The fabricated SAW resonators have good crystal impedance (resonance impedance) and Q-value.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 2003-05-15

著者

• Takagi Michiaki

  Seiko Epson Corporation

• KANNA Shigeo

  Seiko Epson Corporation

• YAMAZAKI Takashi

  Seiko Epson Corporation

• IIZAWA Keigo

  Seiko Epson Corporation

• Takagi Michiaki

  Seiko Epson Corporation, 3-3-5 Owa, Suwa, Nagano 392-8502, Japan

• Kanna Shigeo

  Seiko Epson Corporation, 3-3-5 Owa, Suwa, Nagano 392-8502, Japan

関連論文

• Analysis of Frequency Locations of the In-Harmonics in Quartz Surface Acoustic Wave Resonators Using Helmholtz Equations
• Temperature Stability of Surface Acoustic Wave Resonators on In-Plane Rotated 33° Y-Cut Quartz
• Analysis of Frequency Locations of the In-Harmonics in Quartz Surface Acoustic Wave Resonators Using Helmholtz Equations
• Effect of Substrate Thickness on Quasi-Longitudinal Leaky Surface Acoustic Wave Propagation on Quartz
• Temperature Stability of Surface Acoustic Wave Resonators on In-Plane Rotated 33° Y-Cut Quartz

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