Near-Field Recording with a 266 nm Laser for Disc Mastering Process
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概要
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A near-field mastering process was realized with a 266 nm laser and a solid immersion lens (SIL) of 1.35 numerical aperture (NA). The air gap was detected with a 532 nm laser and it was servo-controlled at about 100 nm by driving the SIL with an air-suspended pad and a piezoelectric transducer (PZT) actuator. A residual fluctuation of the air gap was constrained within 10 nmPP. For a rear converging lens, one of the molded lenses with a wave front error (WFE) of below 70 m$\lambda$rms was selected. It was assembled with a supersphere SIL of about 10 m$\lambda$rms WFE. As a result of read-only memory (ROM) recording in a density corresponding to 40 gigabytes (GB) in compact disc (CD) size, a clear pit pattern was fabricated. As for 25 GB ROM recording, acceptable signal quality was obtained.
- 2003-02-15
著者
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Mukai Nobuhiko
Bd-rom Project Section New Device Process Development Department Manufacturing Engineering Developme
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TAKEDA Minoru
Nano-lithography Section, Department 2, Optical Disc Development Division, AV/IT Development Group,
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YAMAMOTO Masanobu
Nano-lithography Section, Department 2, Optical Disc Development Division, AV/IT Development Group,
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Takagi Katsuji
Bd-rom Project Section New Device Process Development Department Manufacturing Engineering Developme
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Kono Toshiyuki
Bd-rom Project Section New Device Process Development Department Manufacturing Engineering Developme
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Imanishi Shingo
Nano-lithography Section Department 2 Optical Disc Development Division Av/it Development Group Sony
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Kono Toshiyuki
BD-ROM Project Section, New Device Process Development Department, Manufacturing Engineering Development Center, Core Technology & Network Company, SONY Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Takeda Minoru
Nano-lithography Section, Department 2, Optical Disc Development Division, AV/IT Development Group, SONY Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Mukai Nobuhiko
BD-ROM Project Section, New Device Process Development Department, Manufacturing Engineering Development Center, Core Technology & Network Company, SONY Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Takagi Katsuji
BD-ROM Project Section, New Device Process Development Department, Manufacturing Engineering Development Center, Core Technology & Network Company, SONY Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
関連論文
- Near-Field Recording with a 266 nm Laser for Disc Mastering Process
- Near-Field Recording with a 266 nm Laser for Disc Mastering Process