Ge2Sb2Te5 Thin Film Doped with Silver

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概要

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• (Ge2Sb2Te5)100-XAgX films (where $x=0\sim 3$ at.%) with 100 nm thickness were deposited on natural-oxidized silicon wafer and glass substrates by dc magnetron co-sputtering of Ge2Sb2Te5 and Ag targets. The effects of Ag content on the optical properties of the (Ge2Sb2Te5)100-XAgX film were examined by X-ray diffraction, reflectivity and crystalline temperature analysis. It was found that the reflectivity and thermal properties of the Ge2Sb2Te5 film could be improved by doping a small amount of Ag in the Ge2Sb2Te5 film. The crystallization activity energy of the film decreased as the Ag content was increased. However, the crystalline temperature of the film increased with Ag content. The phase-transition temperature of the fcc to hcp phase increased to at least 450°C as $x>0.3$. We found that the contrast of (Ge2Sb2Te5)98.2Ag1.8 film is suitable for blue laser wavelength recording.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2003-02-15

著者

• Chen Sheng-chi

  Department Of Mechanical Engineering De Lin Institute Of Technology

• Chen Po-wei

  Institute Of Communication Engineering National Chi Nan University

• Hsu Wei-chih

  Institute Of Material Science And Engineering National Taiwan University

• Wu Ting-hao

  Institute Of Material Science And Engineering National Taiwan University

• Lie Chao-te

  Institute Of Material Science And Engineering National Taiwan University

• Kuo Po-cheng

  Institute Of Material Science And Engineering National Taiwan University

• Kuo Po-Cheng

  Institute of Material Science and Engineering, National Taiwan University, Taipei 106, Taiwan

• Hsu Wei-Chih

  Institute of Material Science and Engineering, National Taiwan University, Taipei 106, Taiwan

• Wu Ting-Hao

  Institute of Material Science and Engineering, National Taiwan University, Taipei 106, Taiwan

• Chen Po-Wei

  Institute of Material Science and Engineering, National Taiwan University, Taipei 106, Taiwan

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• Ge2Sb2Te5 Thin Film Doped with Silver
• Blue-Laser Readout Properties of Super Resolution Near Field Structure Disc with Inorganic Write-Once Recording Layer

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