Advanced Photoresist for High-Density Groove-Recording Disc

概要

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In high-density mastering process, the relationship between the groove noise of the groove-recording disc and the molecular weight of the photoresist was examined. With a decrease in the molecular weights of novolak resin and the photoactive compound used, the shape of the groove edge became smooth and the groove noise value was reduced. By optimizing the molecular weights of novolak resin and the photoactive compound, the groove noise value is reduced by 3.5 dB at a track pitch of 0.32 μm.
2003-02-15