Minimum Coating Thickness in Pore Size Reduction of Inorganic Substrates through Particle Deposition

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概要

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• The determination of minimum coating thickness for covering substrate holes through particle deposition is achieved with a combined, three-dimensional, on-lattice model, in which both deterministic and non-deterministic driving forces are taken into account. The relative importance of deterministic forces to non-deterministic forces is quantified by a dimensionless parameter, Peclet number. The minimum covering thickness normalized with the characteristic hole size ($h_{\text{c}}/H_{\text{w}}$) is investigated subject to variation in Peclet number ($\mathit{Pe}$) and normalized size ($D_{\text{p}}/L$) of the depositing particle, normalized hole size ($H_{\text{w}}/L$), and degree of post-contact restructuring allowed ($N_{\text{r}}$). It is found that there exists a scaling relationship between the normalized minimum covering thickness and the normalized hole size as $h_{\text{c}}/H_{\text{w}}\sim (H_{\text{w}}/L)^{E}$ with $E=0.53$, 0.54, 0.96, and 1.42 for $\mathit{Pe}$ of 1000, 10, 0.5, and 0.1, respectively. The magnitude of the scaling exponent implies that the hole covering ability of diffusive particle movement varies more than that of ballistic particle movement over variation in hole size. It is also found that $h_{\text{c}}/H_{\text{w}}$ increases with increasing $H_{\text{w}}/L$ and $D_{\text{p}}/L$. At low $\mathit{Pe}$ ($<1$), $h_{\text{c}}/H_{\text{w}}$ increases with increasing $\mathit{Pe}$ for smaller holes, but decreases with increasing $\mathit{Pe}$ for larger holes. For larger $\mathit{Pe}$, $h_{\text{c}}/H_{\text{w}}$ decreases with increasing $\mathit{Pe}$, implying that ballistic particle movement is more efficient in covering holes. Post-contact surface restructuring deteriorates the hole covering efficiency of particle deposition for ballistic movement dominated situations (large $\mathit{Pe}$). But for low $\mathit{Pe}$ situations, there exists an optimal surface restructuring extent, at which $h_{\text{c}}/H_{\text{w}}$ is a minimum.

• 2001-07-15

著者

• Lu Shih-yuan

  Department Of Chemical Engineering National Tsing-hua University

• Yen Yi-ming

  Department Of Chemical Engineering National Tsing-hua University

• Lu Shih-Yuan

  Department of Chemical Engineering, National Tsing-Hua University, Hsin-Chu, Taiwan 30043, Republic of China

• Yen Yi-Ming

  Department of Chemical Engineering, National Tsing-Hua University, Hsin-Chu, Taiwan 30043, Republic of China

関連論文

• Minimum Coating Thickness in Pore Size Reduction of Inorganic Substrates through Particle Deposition
• Minimum Coating Thickness in Pore Size Reduction of Inorganic Substrates through Particle Deposition

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