Atomic-Scale Electron Beam Processing

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概要

• 論文の詳細を見る

• Atomic-scale electron beam processing was demonstrated using high-resolutiontransmission electron microscopy. Nanometer-size holes were produced through magnesiumoxide films. The minimum hole size was 0.84 nm and the minimum distance between theholes was 0.63 nm.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1999-03-15

著者

• Yanaka Takashi

  Electron Beam Division Topcon Corporation

• Kizuka Tokushi

  Department Of Applied Physics Nagoya University

• Yanaka Takashi

  Electron Beam Division, TOPCON Corporation, 75-1 Hasunuma-cho, Itabashi-ku

関連論文

• Time-Resolved High-Resolution Electron Microscopy of Surface-Diffusion of Tungsten Atoms on MgO (001) Surfaces
• Selective Processing of Individual Carbon-Nanotubes Using Atomic Force Microscopy Installed in Transmission Electron Microscope
• Formation and Structural Evolution of Magnesium Oxide Clusters under Electron Irradiation(Structure, Interfaces, and Films)
• Atomic-Scale Electron Beam Processing
• Metal-Insulator Transition in Stable One-Dimensional Arrangements of Single Gold Atoms : Surfaces, Interfaces, and Films
• A Single Vacancy Chain and its Bundle in Magnesium Oxide as Line-Type Lattice Defects
• Atomic-Scale Electron Beam Processing

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