Integrated Optic Accelerometer Employing a Cantilever on a Silicon Substrate

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概要

• 論文の詳細を見る

• A novel integrated optic accelerometer employing a cantilever on a silicon substrate is proposed. An analysis is carried out to demonstrate the feasibility of the proposed sensor and obtain the basic design concept. The sensitivity and the detectable frequency range of the acceleration can be set by proper selection of the cantilever dimensions and the added weight.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1989-02-20

著者

• OHKAWA Masashi

  Department of Biocybernetics, Faculty of Engineering, Niigata University

• Izutsu Masayuki

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560

• Sueta Tadasi

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560

• Ohkawa Masashi

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560

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• Integrated Optic Accelerometer Employing a Cantilever on a Silicon Substrate

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