Inverse Design of Microelectromechanically Controlled Scattering Optical Elements

概要

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Microelectromechanical systems have the potential to revolutionize electro-optical components such as optical switches, attenuators, tunable lasers or add/drop multiplexors. In this work a method of inverse design is applied to generate scattering optical element devices optimized for micromechanical control of the scattered light. These ultracompact devices, only a few micron thick, consists of eight layers of $0.4\times 0.4$ μm2 square shaped bars etched in silicon. By a 400 nm movement of one of the lateral layers the scattering image of the light, after passing the device, is highly controlled, both in space and frequency domain. Two designs are presented; The first design is a $1\times 2$ switch with an expected crosstalk suppressed below $-21$ dB for both states. The second device is a two wavelength demultiplexing device, designed for the wavelengths $\lambda_{0} = 1500$ and $\lambda_{1} = 1550$ nm, with an expected crosstalk suppressed below $-26$ dBs for both channels.
2007-06-25