Laser-Induced Damage and Environmental Stability of Thin Films Deposited by Ion-Assisted Electron-Beam Deposition

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概要

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• The high damage resistance and environmental stability of the thin films deposited by ion-assisted electron-beam deposition were studied. The laser-induced damage thresholds (LIDTs) of antireflection (AR) coatings for pulsed and continuous-wave (CW) yttrium aluminum garnet (YAG) laser irradiations were 13.0 J/cm2 and $5.0\times 10^{2}$ kW/cm2, respectively. The thresholds did not change even under high-temperature and high-humidity ($49\,{\degC}\times 95\%$RH) conditions.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 2007-01-25

著者

• Yoshida Kunio

  Osaka Inst. Of Technolog Osaka Jpn

• Ishida Tomohiko

  Mitsubishi Cable Industries

• Ishida Tomohiko

  Mitsubishi Cable Industries, Amagasaki, Hyogo 660-0856, Japan

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• Laser-Induced Damage and Environmental Stability of Thin Films Deposited by Ion-Assisted Electron-Beam Deposition

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