Polymer-Coated Silicon Micromirror Array for Integrated Optical Pickup Application

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概要

• 論文の詳細を見る

• Fabrication of a micromirror array for the development of an integrated optical pickup using a blue laser diode is demonstrated. The micromirror array can be obtained by combining silicon wet etching and polymer UV embossing. Conventional wet etching of a Si(100) wafer that is cut with a 9.7° tilt toward the $\langle 110\rangle$ direction can produce 45° mirrors; however, the surface roughness is not sufficiently low for the application to optical pickup. To overcome this, we compensated the surface roughness by the addition of polymer UV embossing with a precise glass master mold onto the wet-etched Si surface. The surface roughness of polymer-coated mirror was lower by one-eighth compared to the etched-Si mirror, satisfying the specifications of a mirror for the optical pickup.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 2005-08-10

著者

• Lee Myung

  Materials and Devices Research Center, Samsung Advanced Institute of Technology, P. O. Box 111, Suwon 440-600, Korea

• Kim Hae

  Materials and Devices Research Center, Samsung Advanced Institute of Technology, P. O. Box 111, Suwon 440-600, Korea

• Sohn Jin

  Materials and Devices Research Center, Samsung Advanced Institute of Technology, P. O. Box 111, Suwon 440-600, Korea

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• Polymer-Coated Silicon Micromirror Array for Integrated Optical Pickup Application

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