Highly Sensitive ZnO Ozone Detectors at Room Temperature
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概要
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In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.
- 2003-04-15
著者
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Fortunato Elvira
Department Of Materials Science/cenimat Faculty Of Science And Technonology New University Of Lisbon
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Marques Antonio
Department Of Materials Science/cenimat Faculty Of Science And Technonology New University Of Lisbon
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Bender Marcus
Photonic And Electronic Materials Lab Institute Of Electronic Structure And Laser Foundation For Res
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Cimalla Volker
Photonic And Electronic Materials Lab Institute Of Electronic Structure And Laser Foundation For Res
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Nunes Patricia
Department Of Materials Science/cenimat Faculty Of Science And Technonology New University Of Lisbon
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Ferreira Isabel
Department Of Materials Science/cenimat Faculty Of Science And Technonology New University Of Lisbon
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Martins Rodrigo
Department Of Materials Science/cenimat Faculty Of Science And Technonology New University Of Lisbon
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Katsarakis Nikos
Photonic And Electronic Materials Lab Institute Of Electronic Structure And Laser Foundation For Res
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Kiriakidis George
Photonic And Electronic Materials Lab Institute Of Electronic Structure And Laser Foundation For Res
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Ferreira Isabel
Department of Materials Science/CENIMAT, Faculty of Sciences and Technology, New University of Lisbon and CEMOP/UNINOVA, 2829-516 Caparica, Portugal
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Fortunato Elvira
Department of Materials Science/CENIMAT, Faculty of Sciences and Technology, New University of Lisbon and CEMOP/UNINOVA, 2829-516 Caparica, Portugal
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Marques António
Department of Materials Science/CENIMAT, Faculty of Sciences and Technology, New University of Lisbon and CEMOP/UNINOVA, 2829-516 Caparica, Portugal
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Martins Rodrigo
Department of Materials Science/CENIMAT, Faculty of Sciences and Technology, New University of Lisbon and CEMOP/UNINOVA, 2829-516 Caparica, Portugal
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Kiriakidis George
Photonic and Electronic Materials Lab, Institute of Electronic Structure and Laser, Foundation for Research and Technology Hellas, P.O. Box 1527, 71 110 Heraklion, Crete, Greece
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Nunes Patrícia
Department of Materials Science/CENIMAT, Faculty of Sciences and Technology, New University of Lisbon and CEMOP/UNINOVA, 2829-516 Caparica, Portugal
関連論文
- Highly Sensitive ZnO Ozone Detectors at Room Temperature
- Highly Sensitive ZnO Ozone Detectors at Room Temperature