Deposition of Ultra Fine Particles Using a Gas Jet

概要

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Use of a gas jet for the transfer and deposition of metal or ceramic UFP has been studied. Individual particles having a diameter of less than 0.1 μm, are produced by the so-called gas evaporation method. Deposition of the UFP can be made by preparing a colliding gas flow with UFP on a solid surface. Uniformly distributed deposition of different metals or ceramics, regardless of specific gravity, can also be made. A similar technique is also usable with frozen gas UFP (CO_2 for example). A CO_2 UFP blizzard can remove photoresist without contamination or damage to a substrate (thin film chromium coated on glass). The transfer and deposit technique could be a basic method for handling UFP for industrial application.
1984-12-20