Preparation and evaluation of Ga2O3 oxygen sensors:
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概要
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Recently, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. The Ga2O3 has an oxygen detection characteristic at more than 900℃, so this material attracts much attention as an oxygen sensor at high temperature. The β-Ga2O3 films were prepared by the RF magnetron sputtering method. The effect of two kinds of substrates namely Si (100) and quartz on the oxygen detection characteristics were compared. As a result, it was found that the oxygen gas sensor fabricated on a quartz substrate had superior oxygen detection characteristics.
- 一般社団法人 日本MRSの論文
一般社団法人 日本MRS | 論文
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