Plasma Generation in Organic Solvent for Amorphous Carbon Film Deposition
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概要
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The plasma was generated in organic solvents (ethanol and n-hexane mixture) in order to coating inside the narrow tubes. From measurements of discharge current, plasma is easily generated in ethanol, but the generation of plasma has difficulty in n-hexane. The ratio of mixture of 1:1 is suitable to film deposition, since ethanol is used for plasma generation and hexane is used for source of the films. FTIR spectra exhibited the deposited films are typically polymer-like amorphous carbon (PLC) films.
- 一般社団法人 日本MRSの論文
一般社団法人 日本MRS | 論文
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