Study of thin-film thickness and density by high-resolution Rutherford backscattering spectrometry and X-ray reflectivity
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概要
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High-resolution Rutherford backscattering spectrometry (HR-RBS) and X-ray reflectivity (XRR) are both powerful tools that can be used to investigate thin film structures with the same depth resolution. HR-RBS can be used to analyze low-density contrast films since it reveals the chemical composition in films. The elemental information aids the XRR analysis of films containing localized hydrogen atoms and low-electron-density contrast layers.
- 一般社団法人 日本MRSの論文
一般社団法人 日本MRS | 論文
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