Organic Light-Emitting Microdevices Fabricated by Nanoimprinting Technology Using Diamond Molds
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概要
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The fabrication of organic light-emitting microdevices (micro-OLEDs) by nanoimprint lithography (NIL) using diamond molds fabricated by chemical vapor deposition (CVD) was investigated. The diamond molds used in the NIL process were fabricated with the Bi<SUB>4</SUB>Ti<SUB>3</SUB>O<SUB>12</SUB> octylate (oxide) mask used in electron beam lithography technology. The diamond molds of convex dots of 30 μm square with 60 μm pitch were fabricated. The optimum imprint conditions were found to be as follows: imprinting pressure, press duration, substrate temperature and removal temperature of 0.8 MPa, 15 min, 180°C and 70°C, respectively. The device structure of 30-μm-square-dot OLEDs fabricated by imprinting is indium tin oxide (ITO) [anode]/poly(9-vinylcarbazole) (PVK) and coumarin-6 (C6) (0.1 μm thick) [hole transport and emitting layers]/8-hydroxyquinoline-aluminum (Alq) (50 nm thick) [electron transport layer]/aluminum (Al) (0.1 μm thick) [cathode]. The fabrication and operation of micro-OLEDs with 30 μm square dots in diamond-mold NIL were successfully demonstrated.
- 公益社団法人 応用物理学会の論文
公益社団法人 応用物理学会 | 論文
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