Development of Scanning μ-RHEED Microscopy for Imaging Polycrystal Grain Structure in LSI
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A new type of scanning μ-RHEED (reflection high energy electron diffraction) microscope has been developed. Three diffraction spots of a RHEED pattern were simultaneously selected for imaging. The scanning μ-RHEED images were obtained from the intensity change of the diffraction spots. The distribution of normally rotated micrograins inside the same plane's grain parallel to the surface was successfully observed from the scanning μ-RHEED images. Micrograin structures of poly-Si and Cu thin films were observed with a resolution of less than one micron.
- 公益社団法人 応用物理学会の論文
公益社団法人 応用物理学会 | 論文
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