Progress in Electron Beam Mastering of 100 Gbit/inch2 Density Disc
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概要
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We developed an electron beam recorder (EBR) capable of recording master discs under atmospheric conditions using a novel differential pumping head. Using the EBR and optimized fabrication process for Si-etched discs with reactive ion etching (RIE), a bottom signal jitter of 9.6% was obtained from a 36 Gbit/inch<SUP>2</SUP> density disc, readout using a near-field optical pickup with an effective numerical aperture (NA) of 1.85 and a wavelength of 405 nm. We also obtained the eye patterns from a 70 Gbit/inch<SUP>2</SUP> density disc readout using an optical pickup with a 2.05 NA and the same wavelength, and showed almost the same modulation ratio as the simulation value. Moreover, the capability of producing pit patterns corresponding to a 104 Gbit/inch<SUP>2</SUP> density is demonstrated.
- 公益社団法人 応用物理学会の論文
公益社団法人 応用物理学会 | 論文
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