Deep-UV Liquid Immersion Mastering of High Density Optical Discs

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概要

• 論文の詳細を見る

• A liquid immersion technique has been developed to increase the numerical aperture (NA) of a 257 nm optical disc mastering system from 0.9 to 1.2. The resolution enhancement was demonstrated in grooves. In 25 nm resist, 70 nm wide grooves were written with liquid immersion, compared to 100 nm wide grooves far-field. Liquid immersion was also successfully applied to mastering of read-only-memory (ROM) discs for the Blu-ray Disc system. Replicated discs with a density corresponding to 25 GB in a single layer on a 12 cm disc at a track pitch of 320 nm showed a jitter of 6.9% with limit equalizer.

• 公益社団法人 応用物理学会の論文
• 2003-02-15

著者

• Neijzen Jaap

  Philips Research Laboratories Royal Philips Electronics

• Santen Helmar

  Philips Research Laboratories, Royal Philips Electronics, Prof. Holstlaan 4, 5656 AA, Eindhoven, The Netherlands

関連論文

• Deep-UV Liquid Immersion Mastering of High Density Optical Discs
• Liquid Immersion Deep-UV Optical Disc Mastering for Blu-ray Disc Read-Only Memory
• Two-Dimensional Optical Storage Mastering: Adding a New Dimension to Liquid Immersion Mastering
• Deep-UV Liquid Immersion Mastering of High Density Optical Discs

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