In Situ Surface Characterization of YBa2Cu3O7-x Thin Films Grown by Pulsed Laser Deposition.
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C-axis oriented YBa<SUB>2</SUB>Cu<SUB>3</SUB>O<SUB>7- x</SUB> (YBCO) thin films were grown by pulsed laser deposition and characterized by in situ X-ray photoelectron spectroscopy (XPS), low-energy electron diffraction (LEED) and low-energy ion scattering spectroscopy (LEISS). There existed a degraded layer at the surface of as-deposited YBCO film in contrast with the case of YBCO film grown by an ozone-assisted molecular beam epitaxy method. High background intensity of the LEED pattern and indistinctive LEISS spectra suggested that this degraded layer has poor crystallinity. This degraded layer was caused by impurities in the oxygen gas during film deposition.
- 公益社団法人 応用物理学会の論文
公益社団法人 応用物理学会 | 論文
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