Transmission Electron Microscope Observation of "IR Scattering Defects" in As-Grown Czochralski Si Crystals.
スポンサーリンク
概要
- 論文の詳細を見る
Grown-in defects detected by IR laser scattering tomography (LSTDs) in Czochralski-grown Si crystals were identified for the first time by transmission electron microscopy (TEM) with a special defect positioning technique. The basic structure of each LSTD was revealed to be a composite of two or three incomplete octahedral voids with a total size of 100-300 nm. The TEM images of the defects suggest the existence of walls several nanometers thick surrounding the voids. A weak oxygen signal was detected from the defect by energy dispersive X-ray spectrometry. The thin walls surrounding the voids were considered to be made of SiO<SUB> x</SUB>.
- 公益社団法人 応用物理学会の論文
公益社団法人 応用物理学会 | 論文
- Electron Channelling Effect in an Al–Fe–Cu Quasicrystal
- Construction and Performance of a Large-Aperture Wire-Chamber Spectrometer for Pion Scattering Experiments at KEK
- Effect of Plasma Injection on Cold Wall Type MHD Generator
- Development of Scanning μ-RHEED Microscopy for Imaging Polycrystal Grain Structure in LSI
- Boundary Layer Cooling Effect on Semi-Hot Wall Type MHD Channel