Formation and Surface Acoustic Wave Properties of LiNbO3/AlN/Sapphire.
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概要
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Thin films of LiNbO<SUB>3</SUB> have been formed on AlN films (AlN/sapphire) by pulsed laser deposition. The epitaxial growth of LiNbO<SUB>3</SUB> films is confirmed by X-ray pole figure analysis. Theoretical calculation of surface acoustic wave (SAW) properties has been performed for LiNbO<SUB>3</SUB>/AlN/sapphire. Preliminary results of experimental SAW properties have been shown.
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公益社団法人 応用物理学会 | 論文
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