バイオマイクロアクチュエータ用チタン薄膜材料の創製と機能評価
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概要
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Titanium (Ti) thin films were created on glass and Pb(Zr–Ti)O3 (PZT) substrates using magnetic RF sputtering apparatus. Nano-indentation tests were carried out to study the influence of the Ti thin layer on piezoelectric properties. The piezoelectric properties of the PZT plate and a Ti sputtered one were also measured by laser Doppler vibrometer. Furthermore, some characteristics, such as crystalline structure, depth profiles, and surface roughness of the films were observed by means of an atomic force microscope (AFM). Main conclusions obtained in this study are summarized as follows: (1) From detailed observation and analytical results of AFM, the surface roughness, Ra, tends to increase as Ti film thickness is increased. (2) Several mechanical properties, such as reduced modulus Er and hardness H obtained from nano-indentation tests, are significantly related to film thickness. (3) Piezoelectric response properties are present in as-received PZT specimens and Ti-sputtered PZT specimens. Experimental and FE analytical results indicate that the piezoelectric coefficient is significantly influenced by Ti layer.
- 一般社団法人 軽金属学会の論文
一般社団法人 軽金属学会 | 論文
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