反応性イオンビームスパッタ法によるＢｉ‐Ｆｅ系酸化物膜形成に及ぼす基板の効果

概要

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Nonthermoequilibrium garnet Bi3Fe5O12 is obtainable by direct epitaxial growth onto a single crystalline garnet substrate via vapor phase. Using a reactive ion beam sputtering technique and a target composed of 3Bi2O3 and 5Fe2O3 in molar ratio, variation of crystalline phase with substrate material was widely investigated. The substrate materials examined were fused quartz, sintered alumina, and single crystals of MgO, SrTiO3, MgAl2O4 and Gd3 (ScGa)5O12. The substrate temperatures examined were room temperature, 480 and 540°C. The garnet phase did not occur on the substrates except for the single crystalline garnet. Thermoequilibrium phases, BiFeO3 and Bi2Fe4O9, were only formed on the alumina substrate. A new nonthermoequilibrium oxide composed of Bi : Fe=3 : 5 in molar ratio was formed on the fused quartz, MgO, SrTiO3 and MgAl2O4 substrates by crystallizing during deposition. The oxide was revealed to be antiferromagnetic at'room temperature.
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