Ｃｏ‐Ｃｒスパッタ膜の磁気異方性

概要

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Co-Cr and Co-Cr-W films were prepared by DC magnetron sputtering equipment on PET film. The dependence of magnetic anisotropy constants Ku1 and Ku2 on film thickness was determined from the torque curve measurement. When the film thickness is thin, the Ku1 is very small, and it increases rapidly as the thickness increases. On the other hand, the Ku2 is extremely large for thin films but as the thickness is increased, it decreases rapidly and approaches a nearly constant value. Ku1/Ku2 values are not constant. The dependences of φ2 and φ4 on film thickness were measured, where φ2 and φ4 were tilt angles of the easy magnetization axis from film normal for Ku1 and Ku2. The value of φ2 was not equal to that of φ4. These results suggest that there is another fourfold symmetry besides that of uniaxial anisotropy.
社団法人日本磁気学会の論文