ＣｏＣｒ層を下地とするＣｏＣｒ二層膜の特性
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概要
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Double layer CoCr films with under-layer CoCr of various compositions were continuously prepared by DC magnetron sputtering equipment on PET film.The dependences of Hc and Hk of double layer CoCr film on Cr concentration of under-layer CoCr film were measured. When the Cr concentration of the under-layer is higher than that of the over-layer, the Hk of double layer is larger than that of single layer film. In the case of lower Cr concentration of the under-layer than that of the over-layer, the result is the opposite. On the other hand, the dependence of Hc on Cr concentration of the under-layer film is contrary to that of Hk.According to TEM observation, double layer film with an under-layer of high Cr concentration has larger grain size than does single layer film.
- 社団法人 日本磁気学会の論文
社団法人 日本磁気学会 | 論文
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