イオンアシスト蒸着法によるＣｏ‐Ｃｒ垂直磁気異方性膜
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The effect of ion bombardment during film growth was investigated on perpendicular anisotropy CoCr films. Films were prepared by a web-coater type evaporating system equipped with a Kaufman 3 cm ion source. Ms, Hc⊥ and Δθ50 decreased while Hk⊥ and grain size increased in bombarded films. These results indicate the reduction of crystallographic defects and Cr segregation, suggesting that the grain boundary plays an important role in the segregation.
- 社団法人 日本磁気学会の論文
社団法人 日本磁気学会 | 論文
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