High Pulse-Energy Green Laser for Laser Annealing System by LD-pumped Nd:YAG Laser
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概要
- 論文の詳細を見る
Recently, we have demonstrated high average-power SHG generation by LD-pumped kHz-class pulsed Nd:YAG laser. Using this technique, we have developed a green laser for the YAG Laser Annealing System. We have obtained a green output with high average power (160W) and high pulse-energy (80mJ/pulse). By using an intra-cavity oscillator, a stability of laser beam and efficiency from pumping-LD to the green output are improved on a few times from our recent system with extra-cavity SHG method.
- The Laser Society of Japanの論文
The Laser Society of Japan | 論文
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