クラスターを用いた超短パルス励起EUV光発生
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概要
- 論文の詳細を見る
The property of extreme ultraviolet (EUV) generation from clusters irradiated with ultrashort intense lasers was studied. The cluster jet was well characterized by the interferometric method and the measurement of Rayleigh scattered light. Conversion efficiency of over 1.1 %/str was achieved with an Xe cluster jet irradiated by a sub-picosecond KrF laser pulse. This method is considered one of the most attractive methods of generating EUV light under debris free conditions. Based on the dependence of the wavelength and the pulse duration on EUV generation, a sub-picosecond UV pulse was found most suitable. By reducing the temperature of the gas, comparatively large clusters can be obtained, even for Kr. So they can also become an efficient EUV converter.
- The Laser Society of Japanの論文
The Laser Society of Japan | 論文
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