High Speed Vacuum Pumping Cryopump.
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概要
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High speed vacuum pumping cryopumps for neutral beam injection heating system are presented. Cryo-condensation pumps had been mainly used in large vacuum devices with high gas load and high vacuum operation. However, recently cryosorption pumps with GM cryocooler have been developed for high speed vacuum pump. Cryo-condensation pump is tough to high heat load, on the other hand cryo sorption pump is easy to operate. The features of these two types of cryopump are explained.
- 一般社団法人 日本高圧力技術協会の論文