Structure of aluminum oxide films and their gas desorption properties.
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概要
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Relation between structure of aluminum oxide films on 6063 alloy and their gas desorption property was studied. 6063 alloy etched in alkali solution shows outgassing rates 4.2×10-9torr•l/s•cm2 at 10h after initial evacuation at room temperature and 1.0×10-12torr•l/s•cm2 at 10h after baking at 100°C for 24h. The alloy etched in alkali solution, dried in vacuum and heated in Ar+O2 mixture gas shows outgassing rates 3.2×10-10torr•l/s•cm2 at 10h after initial evacuation at room temperature and 3.9×10-12torr•l/s•cm2 at 10h after baking at 100°C for 24h. The alloy extruded in Ar+O2 mixture gas shows the same outgassing rates. Porous hydrated oxide films are formed on the alloy etched in alkali solution and stored in air. The formation of hydrated oxide films during storage in air is controlled by heating in vacuum and in the Ar+O2 mixture gas after alkali etching. Hydrated oxide films affect outgassing rates.
- 一般社団法人 軽金属学会の論文
一般社団法人 軽金属学会 | 論文
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