Effect of Pyridinium Propylsulfonate on Shape of Electrodeposited Nickel Micro-Bumps
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概要
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To achieve nickel bumps with a high aspect ratio, anisotropic deposition is required in order to control the shape of the micro-bumps from flat to round. Flat bumps were obtained using a nickel sulfamate bath without additives. With the addition of pyridinium propylsulfonate (PPS) to the nickel sulfamate bath, however, the bumps became round. Cathodic polarization of the plating bath with PPS showed that PPS has an inhibiting effect on the deposition reaction. Moreover, the nickel deposition reaction was affected by agitating the plating solution in the PPS bath. Anisotropic deposition was accomplished by agitation from the side of the sample. It is assumed that the PPS is preferentially adsorbed on the edge of bumps under the effect of agitation which affects the bump shape. Therefore, the PPS suppressed deposition growth in the horizontal direction.
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