KrF Laser with x-ray Preionization:Effect of Initial Electron Number Density on Laser Energy
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Output performance of x-ray preionized KrF laser is reported. Flash x-raygenerator used in this work produced 1.5×10<SUP>8</SUP>electrons/cm<SUP>3</SUP>in laser gas. Outputenergy of 140 mJ obtained with x-ray preionization, indicating an electrical efficiencyof 0.93% is greater than 70 mJ obtained with wire corona preionization. KrF laseremission was detected from the initial electron density of about 10<SUP>6</SUP>/cm<SUP>3</SUP>and the laserenergy was found to increase with increasing the initial electron number density.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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