Integrated Optic Flow Meter with Cantilever Structure on Silicon Substrate.
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概要
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An integrated optic flow meter with a cantilever structure is proposed and was built for the first time on a silicon substrate. The sensor with a narrow gap along the cantilever edge is sandwiched between tubes in which a fluid flows. The gap induces pressure difference between the front and back regions of the lever. Cantilever deformation due to the pressure difference is transformed into the intensity change of the lightwave by an integrated optic interferometer. We analyzed the operation and designed a flow meter. A device fabricated was examined for a nitrogen gas flow using a TM-like light mode at 633 nm. The output intensity measured monotonously decreased with increase in the flow from 0 to 600 cc/min at which the output light intensity was 30% of the maximum value at 0 cc/min.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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