UV Laser Ablative Figuring of Optical Elements.
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概要
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A new method has been developed for producing precise optical elements using ArF excimer laserablation of plastic materials together with the wavefront measurement instruments. The ablative figuring of optical plastic coated on the glass substrate is made very successfully for obtaining a desired phase profile.The wavefront distortion of 3 λ, is improved to 0.2 λ by 3 times iterations on the plate of 50mm in diameter. The phase error compensation of micro-lens for high power laser diode has been tried for direct application ofLD for industrial use. The ablative figuring of glass and quartz materials have been also examined, and the absorption process of ArF and F<BR>2 laser was studied by time resolved transmittance measurement.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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