Development of All Solid State Exciter for High Repetition Rate Excimer Laser.
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概要
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We developed an all solid state exciter composed of a semiconductor switch with MAGTs (MOS Assisted Gate-triggered Thyristors) and a single-stage MPC (Magnetic Pulse Compression circuit) for high repetition rate XeCl excimer laser. Thirty two (32) MAGTs connected in series were used as the semiconductor switch for a 25kV-900A-0.6μs pulse generation. For MPC, cobalt-based amorphous alloy treated by annealing was selected as core materials for the purpose of reducing magnetic losses.<BR>The continuous operation with an average laser power of 43W at 3kHz was verified with this exciter. The efficiency of the switch of 75% was obtained at 3kHz operation. The experimental results verify that replacing thyratrons with the all solid state exciter is possible.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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