Normal Incidence Multilayer Mirrors for Soft X-Rays.
スポンサーリンク
概要
- 論文の詳細を見る
We review first the state of the art fabrication techniques for normal incidence multilayer mirrors, and then discuss the problems such as columnar structure, thermal stability, mechanical stress, focusing properties of multilayer mirrors, film thickness distribution, and finally the applications of multilayer mirrors for the x-ray lasers and x-ray projection lithography, using mainly the data experimentally obtained.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
- Possible Isotope Separation by a Process of Nuclear Excitation by Electron Transition
- Integrated Optic Flow Meter with Cantilever Structure on Silicon Substrate.
- タイトル無し
- Application of Tunable Vacuum-Ultraviolet Laser to Chemical Reaction Dynamics.
- タイトル無し