Application of Ion Cyclotron Resonance Fourier Transform Mass Spectrometry to Laser Materials Processings.
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概要
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Ion cyclotron resonance Fourier transform mass spectrometry which is a mass analysis method with feasibility of fast measurement of big molecules like organic and bio-molecules is reviewed. The mass-resolution reaches as high as 140, 000. The pulsed detection technique is easily combined with a pulsed ionization technique, for example, pulse-laser desorptiOn and pulse-laser ablation. The experimental results on Si3N4 ablation with ArF excimer laser are shown.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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