Vacuum Ultraviolet Xenon Excimer Light Source Excited by a Pulsed Jet Discharge.
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概要
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We have developed a new xenon excimer light source in vacuum ultraviolet (VUV). The use of a pulsed gas jet discharge realized efficient cluster excitation and spatially localized emission in VUV with an extremely long pulse duration. An output power of 1.5 W was obtained with a pulse width of 5 ms at 176 nm, corresponding to an efficiency of 3.0%.
- 社団法人 レーザー学会の論文
社団法人 レーザー学会 | 論文
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